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Title
Draft patent application for 'An improved ion accelerator for semiconductor manufacturing' by Chick
Reference
UK0108 NAEST 065/D/44
Date
n.d. [1977]
Physical description
Number of pieces: 1
Language
English.
Subject
Semiconductors, Patents
Conditions governing access
Open
Level of description
file

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110000001
NATIONAL ARCHIVE FOR ELECTRICAL SCIENCE AND TECHNOLOGY
contains 322 parts
- UK0108 NAEST 065
  Papers of Douglas Richard Chick
  contains 4 parts
  - UK0108 NAEST 065/D
    Material relating to the University of Surrey
    contains 48 parts
    
    UK0108 NAEST 065/D/44
    Draft patent application for 'An improved ion accelerator for semiconductor manufacturing' by Chick

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